Parts For Sale TEGAL 51-277-001 TEGAL 51-277-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-277-001 Manufacturer TEGAL Part Number 51-277-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 74-098-001 52-089-001 52-050-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 52-167-001 40-790-001 FOCUS RING 58-046-001 37-471-001A 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%