Parts For Sale TEGAL 51-273-001 TEGAL 51-273-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-273-001 Manufacturer TEGAL Part Number 51-273-001 Description Status Available Approx. Qty 165 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 165.0 US Other TEGAL Parts 58-073-001 39-741-004 ELECTRODE, LOWER 6" 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 39-894-001 39-956-001 52-047-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 39-735-004 Tegal 903e lower electrode