Parts For Sale TEGAL 51-271-001 TEGAL 51-271-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-271-001 Manufacturer TEGAL Part Number 51-271-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 58-073-001 40-768-004 Insulator Ring 93-229-005 RF CABLE 901E 46-810-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 52-171-001 52-047-002 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02