Parts For Sale TEGAL 51-265-001 TEGAL 51-265-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-265-001 Manufacturer TEGAL Part Number 51-265-001 Description Status Available Approx. Qty 11 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 11.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 37-476-003 39-818-005C 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 37-586-003 49-060-001 57-008-001 39-733-004 Tegal 903e lower electrode 41-177-002