Parts For Sale TEGAL 51-253-001 TEGAL 51-253-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-253-001 Manufacturer TEGAL Part Number 51-253-001 Description Status Available Approx. Qty 27 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 27.0 US Other TEGAL Parts 38-023-001 COOLING RING 37-525-002 54-011-001 37-605-001 58-043-004 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT CR1144-00103 CR1144-00103 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 99-249-002 PCB TEGAL END POINT DETECTOR 37-479-001B 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 150 mm 150 mm 25 slot Aluminum wafer carrier.