Parts For Sale TEGAL 51-189-002 TEGAL 51-189-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-189-002 Manufacturer TEGAL Part Number 51-189-002 Description Status Available Approx. Qty 20 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 20.0 US Other TEGAL Parts 58-073-001 40-768-004 Insulator Ring 37-181-001 80-650-053 ACTUATOR 74-101-001 40-140-001 RING, CERAMIC INSULATOR 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-956-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 40-790-001 FOCUS RING 50-056-001
