Parts For Sale TEGAL 51-101-001 TEGAL 51-101-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-101-001 Manufacturer TEGAL Part Number 51-101-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 39-853-005 46-180-001 51-191-001 46-786-001 40-295-003 FOCUS RING 40-790-001 FOCUS RING 52-059-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-665-001 83-288-001