Parts For Sale TEGAL 51-101-001 TEGAL 51-101-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-101-001 Manufacturer TEGAL Part Number 51-101-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 51-251-001 51-092-001 74-124-005 46-787-003 51-259-001 39-733-004 Tegal 903e lower electrode 40-576-003-C Ring Ceramic Focus Castellated 52-175-001
