Parts For Sale TEGAL 50-067-001 TEGAL 50-067-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 50-067-001 Manufacturer TEGAL Part Number 50-067-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 80-195-450 51-056-001 42-826-005 39-380-001 50-088-001 39-761-001 99-287-003 SHUTTLE INTERFACE BOARD 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 40-260-001 WINDOW, SAPPHIRE 1x2.5 37-175-001A 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 39-735-004 Tegal 903e lower electrode