Parts For Sale TEGAL 50-066-002 TEGAL 50-066-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 50-066-002 Manufacturer TEGAL Part Number 50-066-002 Description Status Available Approx. Qty 71 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 71.0 US Other TEGAL Parts 58-073-001 37-181-001 99-247-003 SPATULA INTERFACE 74-101-001 39-894-001 39-956-001 39-733-004 Tegal 903e lower electrode 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 50-056-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL