Parts For Sale TEGAL 49-078-002 TEGAL 49-078-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 49-078-002 Manufacturer TEGAL Part Number 49-078-002 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 37-476-003 40-481-002 Insulator Ring 39-818-005C 93-229-005 RF CABLE 901E 37-586-003 49-060-001 57-008-001 40-790-001 FOCUS RING 51-265-001 150 mm 150 mm 25 slot Aluminum wafer carrier.