Parts For Sale TEGAL 47-714-001 TEGAL 47-714-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-714-001 Manufacturer TEGAL Part Number 47-714-001 Description Status Available Approx. Qty 17 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 17.0 US Other TEGAL Parts 58-073-001 39-741-004 ELECTRODE, LOWER 6" 46-810-001 40-467-001 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 52-171-001 52-047-002 40-790-001 FOCUS RING 150 mm 150 mm 25 slot Aluminum wafer carrier.