Parts For Sale TEGAL 47-684-001 TEGAL 47-684-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-684-001 Manufacturer TEGAL Part Number 47-684-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 51-191-001 46-786-001 83-259-001 46-787-002 49-027-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 52-059-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier.