Parts For Sale TEGAL 47-683-002 TEGAL 47-683-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-683-002 Manufacturer TEGAL Part Number 47-683-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 58-073-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 46-1006-001 46-810-001 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 52-171-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002 150 mm 150 mm 25 slot Aluminum wafer carrier.