Parts For Sale TEGAL 47-642-002 TEGAL 47-642-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-642-002 Manufacturer TEGAL Part Number 47-642-002 Description Status Available Approx. Qty 10 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 10.0 US Other TEGAL Parts 46-1006-001 37-411-001 54-011-001 37-605-001 58-043-004 CR1144-00103 CR1144-00103 99-249-002 PCB TEGAL END POINT DETECTOR 40-260-001 WINDOW, SAPPHIRE 1x2.5 37-479-001B 39-735-004 Tegal 903e lower electrode