Parts For Sale TEGAL 47-642-002 TEGAL 47-642-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-642-002 Manufacturer TEGAL Part Number 47-642-002 Description Status Available Approx. Qty 10 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 10.0 US Other TEGAL Parts 58-073-001 38-023-001 COOLING RING 83-259-001 46-810-001 40-467-001 39-894-001 52-171-001 52-047-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-735-004 Tegal 903e lower electrode 80-200-121 BEARING DOOR T915 TEGAL CORPORATION
