Parts For Sale TEGAL 47-642-002 TEGAL 47-642-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-642-002 Manufacturer TEGAL Part Number 47-642-002 Description Status Available Approx. Qty 10 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 10.0 US Other TEGAL Parts 58-073-001 37-181-001 52-058-002 46-1006-001 40-395-001 RING, FLAT 6 74-101-001 39-956-001 47-695-001 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 99-249-002 PCB TEGAL END POINT DETECTOR 50-056-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%