Parts For Sale TEGAL 47-600-002 TEGAL 47-600-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-600-002 Manufacturer TEGAL Part Number 47-600-002 Description Status Available Approx. Qty 23 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 23.0 US Other TEGAL Parts 37-383-004 46-810-001 40-467-001 39-894-001 39-733-004 Tegal 903e lower electrode 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-171-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%