Parts For Sale TEGAL 47-596-002 TEGAL 47-596-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-596-002 Manufacturer TEGAL Part Number 47-596-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 47-639-001 39-741-004 ELECTRODE, LOWER 6" 52-058-002 37-223-008 46-1006-001 40-374-006 47-733-001 46-787-002 50-079-002 40-140-001 RING, CERAMIC INSULATOR 150 mm 150 mm 25 slot Aluminum wafer carrier.
