Parts For Sale TEGAL 47-596-002 TEGAL 47-596-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-596-002 Manufacturer TEGAL Part Number 47-596-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 58-073-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 46-810-001 40-467-001 39-894-001 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 52-171-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 150 mm 150 mm 25 slot Aluminum wafer carrier.