Parts For Sale TEGAL 47-594-002 TEGAL 47-594-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-594-002 Manufacturer TEGAL Part Number 47-594-002 Description Status Available Approx. Qty 15 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 15.0 US Other TEGAL Parts 37-383-004 80-650-053 ACTUATOR 39-756-003 40-395-001 RING, FLAT 6 46-810-001 40-467-001 39-894-001 39-761-001 52-171-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.