Parts For Sale TEGAL 47-594-001 TEGAL 47-594-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-594-001 Manufacturer TEGAL Part Number 47-594-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 58-073-001 46-810-001 40-467-001 39-894-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-171-001 52-047-002 40-790-001 FOCUS RING 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 150 mm 150 mm 25 slot Aluminum wafer carrier.
