Parts For Sale TEGAL 47-563-002 TEGAL 47-563-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-563-002 Manufacturer TEGAL Part Number 47-563-002 Description Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 13.0 US Other TEGAL Parts 58-073-001 39-853-005 40-481-002 Insulator Ring 39-756-003 93-229-005 RF CABLE 901E 74-101-001 40-467-001 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 52-047-002