Parts For Sale TEGAL 47-563-002 TEGAL 47-563-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-563-002 Manufacturer TEGAL Part Number 47-563-002 Description Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 13.0 US Other TEGAL Parts 58-073-001 46-810-001 40-467-001 40-140-001 RING, CERAMIC INSULATOR 39-894-001 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 52-171-001 52-047-002 40-576-003-C Ring Ceramic Focus Castellated
