Parts For Sale TEGAL 47-563-002 TEGAL 47-563-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-563-002 Manufacturer TEGAL Part Number 47-563-002 Description Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 13.0 US Other TEGAL Parts 37-181-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 40-768-006 Insulator Ring 39-680-003 ELECTRODE, CONEHEAD VENTED 74-101-001 47-583-001 39-956-001 47-695-001 50-056-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
