Parts For Sale TEGAL 47-529-001 TEGAL 47-529-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-529-001 Manufacturer TEGAL Part Number 47-529-001 Description Status Available Approx. Qty 15 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 15.0 US Other TEGAL Parts 58-073-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 46-810-001 40-467-001 39-894-001 52-171-001 52-047-002 40-304-001 ELECTRODE, INSULATOR LOWER 37-222-002 Cooling Plate 39-735-004 Tegal 903e lower electrode 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL
