Parts For Sale TEGAL 47-527-001 TEGAL 47-527-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-527-001 Manufacturer TEGAL Part Number 47-527-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 39-756-003 40-395-001 RING, FLAT 6 74-098-001 52-050-001 39-733-004 Tegal 903e lower electrode 52-041-001 51-271-001 58-046-001 47-736-001