Parts For Sale TEGAL 47-526-005 TEGAL 47-526-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-526-005 Manufacturer TEGAL Part Number 47-526-005 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 80-650-053 ACTUATOR 74-098-001 52-050-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 52-041-001 51-271-001 58-046-001 47-736-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.