Parts For Sale TEGAL 47-521-001 TEGAL 47-521-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-521-001 Manufacturer TEGAL Part Number 47-521-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 39-637-001 40-404-001 51-267-001 51-250-001 80-650-053 ACTUATOR 83-259-001 40-295-003 FOCUS RING 39-832-001 40-304-001 ELECTRODE, INSULATOR LOWER 80-200-001