Parts For Sale TEGAL 47-521-001 TEGAL 47-521-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-521-001 Manufacturer TEGAL Part Number 47-521-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 80-195-450 51-056-001 42-826-005 39-380-001 50-088-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 37-175-001A 150 mm 150 mm 25 slot Aluminum wafer carrier. 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL