Parts For Sale TEGAL 47-520-001 TEGAL 47-520-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-520-001 Manufacturer TEGAL Part Number 47-520-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 31-406-003 WAFER SENSOR ASSY-VCE 46-1006-001 74-098-001 52-050-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 39-741-009 Tegal 903e lower electrode 52-041-001 51-271-001 58-046-001 47-736-001