Parts For Sale TEGAL 47-520-001 TEGAL 47-520-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-520-001 Manufacturer TEGAL Part Number 47-520-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 58-073-001 52-058-002 83-259-001 74-101-001 40-467-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-956-001 52-047-002 40-576-003-C Ring Ceramic Focus Castellated 150 mm 150 mm 25 slot Aluminum wafer carrier.
