Parts For Sale TEGAL 47-482-001 TEGAL 47-482-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-482-001 Manufacturer TEGAL Part Number 47-482-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 58-073-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 38-023-001 COOLING RING 46-810-001 40-467-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 52-171-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002 40-304-001 ELECTRODE, INSULATOR LOWER