Parts For Sale TEGAL 47-482-001 TEGAL 47-482-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-482-001 Manufacturer TEGAL Part Number 47-482-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 46-180-001 39-756-003 51-191-001 46-786-001 49-027-001 50-022-001 99-249-002 PCB TEGAL END POINT DETECTOR 40-790-001 FOCUS RING 39-665-001 150 mm 150 mm 25 slot Aluminum wafer carrier.