Parts For Sale TEGAL 47-452-001 TEGAL 47-452-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-452-001 Manufacturer TEGAL Part Number 47-452-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 58-073-001 39-741-004 ELECTRODE, LOWER 6" 46-810-001 40-467-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 52-171-001 52-047-002 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 150 mm 150 mm 25 slot Aluminum wafer carrier.