Parts For Sale TEGAL 47-442-001 TEGAL 47-442-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-442-001 Manufacturer TEGAL Part Number 47-442-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 47-634-001 40-768-004 Insulator Ring 99-247-003 SPATULA INTERFACE 31-406-003 WAFER SENSOR ASSY-VCE 54-011-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 37-605-001 58-043-004 47-474-001 CR1144-00103 CR1144-00103 40-576-003-C Ring Ceramic Focus Castellated 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02