Parts For Sale TEGAL 47-438-001 TEGAL 47-438-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-438-001 Manufacturer TEGAL Part Number 47-438-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 37-181-001 99-247-003 SPATULA INTERFACE 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-583-001 39-956-001 47-695-001 40-304-001 ELECTRODE, INSULATOR LOWER 50-056-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE