Parts For Sale TEGAL 47-406-003 TEGAL 47-406-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-406-003 Manufacturer TEGAL Part Number 47-406-003 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 40-768-004 Insulator Ring 39-853-005 37-223-008 40-374-006 46-787-002 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 50-079-002 47-639-001 39-741-009 Tegal 903e lower electrode 47-733-001 150 mm 150 mm 25 slot Aluminum wafer carrier.