Parts For Sale TEGAL 47-389-002 TEGAL 47-389-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-389-002 Manufacturer TEGAL Part Number 47-389-002 Description Status Available Approx. Qty 21 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 21.0 US Other TEGAL Parts 58-073-001 40-481-002 Insulator Ring 46-810-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 39-894-001 52-171-001 52-047-002 40-790-001 FOCUS RING 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02