Parts For Sale TEGAL 47-388-001 TEGAL 47-388-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-388-001 Manufacturer TEGAL Part Number 47-388-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 74-098-001 52-050-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 52-041-001 99-249-002 PCB TEGAL END POINT DETECTOR 40-576-003-C Ring Ceramic Focus Castellated 58-046-001 47-736-001 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier. 47-445-001