Parts For Sale TEGAL 47-388-001 TEGAL 47-388-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-388-001 Manufacturer TEGAL Part Number 47-388-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 37-181-001 52-058-002 31-406-003 WAFER SENSOR ASSY-VCE 74-101-001 47-583-001 39-956-001 40-295-003 FOCUS RING 47-695-001 99-249-002 PCB TEGAL END POINT DETECTOR 40-790-001 FOCUS RING 50-056-001