Parts For Sale TEGAL 47-387-001 TEGAL 47-387-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-387-001 Manufacturer TEGAL Part Number 47-387-001 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 51-251-001 51-092-001 74-124-005 40-481-002 Insulator Ring 46-787-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-741-026 Tegal 903e lower electrode 51-259-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 39-741-009 Tegal 903e lower electrode 52-175-001