Parts For Sale TEGAL 47-387-001 TEGAL 47-387-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-387-001 Manufacturer TEGAL Part Number 47-387-001 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 40-395-001 RING, FLAT 6 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 74-098-001 52-050-001 40-295-003 FOCUS RING 52-041-001 58-046-001 47-736-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 47-445-001