Parts For Sale TEGAL 47-381-002 TEGAL 47-381-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-381-002 Manufacturer TEGAL Part Number 47-381-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 46-1006-001 74-098-001 52-050-001 52-041-001 40-790-001 FOCUS RING 58-046-001 47-736-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 47-445-001