Parts For Sale TEGAL 47-377-001 TEGAL 47-377-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-377-001 Manufacturer TEGAL Part Number 47-377-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 51-251-001 51-092-001 31-406-003 WAFER SENSOR ASSY-VCE 74-124-005 38-023-001 COOLING RING 80-650-053 ACTUATOR 46-787-003 51-259-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 52-175-001 150 mm 150 mm 25 slot Aluminum wafer carrier.