Parts For Sale TEGAL 47-286-003 TEGAL 47-286-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-286-003 Manufacturer TEGAL Part Number 47-286-003 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 58-073-001 40-768-004 Insulator Ring 40-395-002 Ring Ceramic 125C Castellated 40-467-001 47-339-005 39-741-026 Tegal 903e lower electrode 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 40-295-003 FOCUS RING 52-171-001 52-047-002 80-200-121 BEARING DOOR T915 TEGAL CORPORATION
