Parts For Sale TEGAL 47-286-003 TEGAL 47-286-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-286-003 Manufacturer TEGAL Part Number 47-286-003 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 40-395-001 RING, FLAT 6 80-195-450 51-056-001 42-826-005 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-380-001 50-088-001 37-175-001A 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE