Parts For Sale TEGAL 47-286-003 TEGAL 47-286-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-286-003 Manufacturer TEGAL Part Number 47-286-003 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 46-180-001 40-482-001 47-437-001 52-169-001 52-047-001 39-735-004 Tegal 903e lower electrode 39-665-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 55-008-001 BELT SPAT