Parts For Sale TEGAL 47-279-001 TEGAL 47-279-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-279-001 Manufacturer TEGAL Part Number 47-279-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 99-247-003 SPATULA INTERFACE 47-339-005 52-050-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 99-287-003 SHUTTLE INTERFACE BOARD 52-041-001 80-871-146 CABLE MTCH NTWK INSTALLATION POSSIBLE ON: TEGAL 903 OPM: ... 58-046-001 47-736-001 150 mm 150 mm 25 slot Aluminum wafer carrier. 47-445-001