Parts For Sale TEGAL 47-278-001 TEGAL 47-278-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-278-001 Manufacturer TEGAL Part Number 47-278-001 Description Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 13.0 US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 39-756-003 40-395-001 RING, FLAT 6 46-810-001 40-467-001 47-339-005 40-140-001 RING, CERAMIC INSULATOR 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 52-171-001 52-047-002 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02
