Parts For Sale TEGAL 47-270-001 TEGAL 47-270-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-270-001 Manufacturer TEGAL Part Number 47-270-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 58-073-001 40-768-004 Insulator Ring 38-023-001 COOLING RING 74-101-001 40-467-001 39-894-001 39-956-001 52-047-002 80-202-357 O-Ring 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.