Parts For Sale TEGAL 47-264-001 TEGAL 47-264-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-264-001 Manufacturer TEGAL Part Number 47-264-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 52-058-002 80-195-450 51-056-001 42-826-005 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-380-001 50-088-001 37-175-001A 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier.