Parts For Sale TEGAL 47-264-001 TEGAL 47-264-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-264-001 Manufacturer TEGAL Part Number 47-264-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 58-073-001 40-395-001 RING, FLAT 6 74-101-001 40-467-001 39-894-001 39-956-001 40-295-003 FOCUS RING 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.