Parts For Sale TEGAL 47-246-002 TEGAL 47-246-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-246-002 Manufacturer TEGAL Part Number 47-246-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 37-223-008 46-1006-001 40-374-006 46-787-002 50-079-002 47-639-001 99-287-003 SHUTTLE INTERFACE BOARD 40-295-003 FOCUS RING 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 47-733-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%