Parts For Sale TEGAL 47-246-002 TEGAL 47-246-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-246-002 Manufacturer TEGAL Part Number 47-246-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 39-637-001 40-768-004 Insulator Ring 40-404-001 40-768-006 Insulator Ring CR1008-00104 51-267-001 38-023-001 COOLING RING 83-259-001 CR1144-00103 CR1144-00103 39-832-001 40-790-001 FOCUS RING