Parts For Sale TEGAL 47-172-006 TEGAL 47-172-006 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-172-006 Manufacturer TEGAL Part Number 47-172-006 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 37-181-001 74-101-001 47-583-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-956-001 47-695-001 40-790-001 FOCUS RING 40-304-001 ELECTRODE, INSULATOR LOWER 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 50-056-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL