Parts For Sale TEGAL 47-172-006 TEGAL 47-172-006 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-172-006 Manufacturer TEGAL Part Number 47-172-006 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 51-251-001 51-092-001 74-124-005 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 51-259-001 99-249-002 PCB TEGAL END POINT DETECTOR 47-261-002 40-304-001 ELECTRODE, INSULATOR LOWER 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 52-175-001 150 mm 150 mm 25 slot Aluminum wafer carrier.