Parts For Sale TEGAL 47-169-001 TEGAL 47-169-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-169-001 Manufacturer TEGAL Part Number 47-169-001 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 37-181-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 31-406-003 WAFER SENSOR ASSY-VCE 74-101-001 47-583-001 39-761-001 39-956-001 47-695-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 50-056-001