Parts For Sale TEGAL 47-169-001 TEGAL 47-169-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-169-001 Manufacturer TEGAL Part Number 47-169-001 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 47-639-001 161-0040K VALVE, INLINE VACUUM 99-247-003 SPATULA INTERFACE 37-223-008 31-406-003 WAFER SENSOR ASSY-VCE 40-374-006 47-733-001 46-787-002 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 50-079-002 55-008-001 BELT SPAT