Parts For Sale TEGAL 47-155-001 TEGAL 47-155-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-155-001 Manufacturer TEGAL Part Number 47-155-001 Description Status Available Approx. Qty 138 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 138.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 46-1006-001 47-339-005 52-050-001 52-041-001 58-046-001 47-736-001 39-735-004 Tegal 903e lower electrode 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 47-445-001
