Parts For Sale TEGAL 47-117-002 TEGAL 47-117-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-117-002 Manufacturer TEGAL Part Number 47-117-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 40-768-006 Insulator Ring 47-526-001 93-229-005 RF CABLE 901E 51-191-001 46-786-001 47-672-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 40-260-001 WINDOW, SAPPHIRE 1x2.5 52-059-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 83-288-001