Parts For Sale TEGAL 47-115-001 TEGAL 47-115-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-115-001 Manufacturer TEGAL Part Number 47-115-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 40-768-006 Insulator Ring 161-0040K VALVE, INLINE VACUUM 47-155-001 40-374-006 46-787-002 50-079-002 47-639-001 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 99-249-002 PCB TEGAL END POINT DETECTOR 47-733-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%