Parts For Sale TEGAL 47-115-001 TEGAL 47-115-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-115-001 Manufacturer TEGAL Part Number 47-115-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 47-158-002 93-229-005 RF CABLE 901E 47-339-005 52-050-001 40-295-003 FOCUS RING 93-123-006 BELT 52-041-001 58-046-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 47-445-001