Parts For Sale TEGAL 47-104-001 TEGAL 47-104-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-104-001 Manufacturer TEGAL Part Number 47-104-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 58-073-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 80-650-053 ACTUATOR 40-467-001 47-339-005 40-140-001 RING, CERAMIC INSULATOR 39-894-001 52-171-001 52-047-002 80-202-357 O-Ring 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 37-222-002 Cooling Plate
