Parts For Sale TEGAL 47-003-002 TEGAL 47-003-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-003-002 Manufacturer TEGAL Part Number 47-003-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 58-073-001 80-650-053 ACTUATOR 74-101-001 40-467-001 40-140-001 RING, CERAMIC INSULATOR 47-101-002 39-894-001 39-956-001 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 37-222-002 Cooling Plate 39-735-004 Tegal 903e lower electrode 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
