Parts For Sale TEGAL 47-003-002 TEGAL 47-003-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-003-002 Manufacturer TEGAL Part Number 47-003-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 93-229-005 RF CABLE 901E 40-140-001 RING, CERAMIC INSULATOR 47-339-005 52-050-001 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 93-123-006 BELT 39-741-009 Tegal 903e lower electrode 52-041-001 47-105-001 58-046-001 47-445-001