Parts For Sale TEGAL 46-973-002 TEGAL 46-973-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-973-002 Manufacturer TEGAL Part Number 46-973-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 99-247-003 SPATULA INTERFACE 74-098-001 47-339-005 52-050-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-105-001 58-046-001 47-736-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 39-735-004 Tegal 903e lower electrode 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02