Parts For Sale TEGAL 46-973-001 TEGAL 46-973-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-973-001 Manufacturer TEGAL Part Number 46-973-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 38-023-001 COOLING RING 39-756-003 40-395-001 RING, FLAT 6 80-195-450 51-056-001 42-826-005 47-006-002 47-161-001 40-295-003 FOCUS RING 37-175-001A 37-222-002 Cooling Plate
