Parts For Sale TEGAL 46-973-001 TEGAL 46-973-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-973-001 Manufacturer TEGAL Part Number 46-973-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 58-073-001 74-101-001 40-467-001 47-101-002 39-894-001 39-761-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 39-733-004 Tegal 903e lower electrode 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 99-249-002 PCB TEGAL END POINT DETECTOR