Parts For Sale TEGAL 46-971-002 TEGAL 46-971-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-971-002 Manufacturer TEGAL Part Number 46-971-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 58-073-001 38-023-001 COOLING RING 40-467-001 47-339-005 47-101-002 39-894-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 39-733-004 Tegal 903e lower electrode 52-047-002 40-576-003-C Ring Ceramic Focus Castellated 37-222-002 Cooling Plate 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
