Parts For Sale TEGAL 46-971-002 TEGAL 46-971-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-971-002 Manufacturer TEGAL Part Number 46-971-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 93-229-005 RF CABLE 901E 39-741-026 Tegal 903e lower electrode 47-339-005 52-050-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 52-041-001 47-105-001 58-046-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 47-445-001